Optical waveguide cantilever actuated by light
K. Zinoviev, C. Dominguez, J. A. Plaza, and L. M. Lechuga
Appl. Phys. Lett., 92(1), 2008, 011908/1-3 - DOI: 10.1063/1.2830818
Abstract: We present experimental studies and theoretical analysis of a microcantilever working as an optical waveguide metallized from one side and actuated by light propagating inside it. Light absorbed in the metallic layer increases the temperature of the bimetallic structure and induces the cantilever bending. Dynamical properties of the cantilevers were studied using actuation by light modulated at frequencies of up to 800 Hz. The deflection of the cantilever by 400 nm was obtained while 0.25 mW of light power was coupled inside it.