Optical biosensor microsystems based on the integration of highly sensitive Mach-Zehnder interferometer devices
B. Sepúlveda, J. Sánchez del Río, M. Moreno, F.J. Blanco, C. Domínguez and L. M. Lechuga
J. of Optics A: Pure and Applied Optics, 8, 2006, S561-S566 - DOI: 10.1088/1464-4258/8/7/S41
Abstract: We present highly sensitive optical biosensors able to be fully integrated in lab-on-a-chip microsystems using standard CMOS compatible processes. These optical biosensors are based on integrated Mach–Zehnder interferometers, which have been designed to have high surface sensitivity and monomode behaviour. As a biosensing application of the devices we show the real-time detection of the covalent immobilization and hybridization of DNA strands without labeling. In order to achieve a lab-on-a-chip portable microsystem, we present the integration of the sensor with a CMOS compatible microfluidic system using SU-8 photolithography patterned layers.