System and method for detecting the displacement of a plurality of micro- and nanomechanical elements, such as microcantilevers

L. M. Lechuga, M. Álvarez, J. Tamayo

Publication No.: WO2005086172
Application No.: EP1733399 Granted (2008); PCT/EP2005/002356, US7646494 (Granted 2010); JP4603036 (Granted 2008); GR20080100758
Priority date: 8/03/2004

Owners: Industry

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